High-Temperature Epitaxial Silicon Encapsulation for High-Stability Clocks and Sensors










Prof. Dr. Thomas Kenny

Professor of Engineering and

Senior Associate Dean of Engineering for Student Affairs

Stanford University







Dr. Thomas Kenny is currently the Richard W. Weiland Chaired Professor of Mechanical Engineering and Senior Associate Dean for Student Affairs.  His research investigates fundamental issues and applications of micromechanical structures.  Dr. Kenny has been co-founder of 3 startup companies (Cooligy - acquired by Emerson, SiTime - acquired by Megachips, and Applaud Medical - currently in human clinical trials). He served as Program Manager in the Microsystems Technology Office at DARPA from 2006-2010. He was General Chair for Transducers 2015 (just concluded), and has been involved in several other conferences. He has advised more than 50 PhD students and co-authored more than 250 technical publications and more than 50 issued patents.




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