Finding a guide for future MEMS by learning from the past
Prof. Dr. Masayoshi Esashi
Professor, Micro System Integration Center (µSIC)
江刺 正喜 氏
MEMS which have not only circuits but also sensors, actuators by extended semiconductor fabrication have been playing important roles in systems. Its development requires basic technologies and knowledge of different fields, applications and past as well. The presentation is aimed at supporting new MEMS development by showing initial stages of MEMS used now.
Pressure sensors were pioneered by piezoresistive type developed for automotive engine control by Dr. Isemi Igarashi in Toyota Central Research Laboratory. MEMS accelerometer was first developed at Stanford University as piezoresistive type. It was followed by capacitive type used as crash sensors for air-bag systems and lately used for user interfaces for smartphones being combined with gyroscopes and microphones.
In addition to these mechanical sensors, optical MEMS for mirror arrays for projectors, resonators for frequency sources and RF filters, fluidics for on-chip micro analytical systems and other MEMS have been developed and used.
Masayoshi Esashi received B.E. and Dr.E. degrees in electronic engineering from Tohoku University in 1971 and 1976, respectively. He served as a research associate from 1976 and an associate professor from 1981 at the Department of Electronic Engineering, Tohoku University.
Since 1990 he has been a professor and he is now in Micro System Integration Center (μSIC) and concurrently a research fellow in Center of Innovation (COI) in Tohoku University. His research interests include MEMS (Micro Electro Mechanical Systems), integrated sensors, microsystems and MEMS packaging.
Books (Japanese) : “Fundamentals of semiconductor integrated circuit design” Baifukan (1981), “Introduction of MEMS” Morikita publishing (2011), “Future of MEMS” Morikita publishing (2016) etc.
Awards : Purple Ribbon Award (2006), IEEE Andrew S. Grove Award (2015), IEEE Andrew Jun-ichi Nishizawa medal (2016) etc.