Aerosol Sensors Using Thermal-Piezoresistive MEMS Oscillators





Prof. Sheng-Shian Li


Institute of NanoEngineering and MicroSystems

National Tsing Hua University




A miniaturized aerosol sensor utilizing an SOI-MEMS thermal-piezoresistive oscillator (TPO) will be presented in this talk. This work takes advantage of a fully differential MEMS design and measurement technique of an II-BAR resonator array that can reduce feedthrough level of ~67dB, thus leading to a clean resonant peak with ~20dB stopband rejection under a direct measurement. As compared to the self-sustained TPO, the DC power consumption and operating temperature of the device can be significantly reduced by integrating MEMS resonators and sustaining circuits, which leads to a longer lifetime with lower power consumption and makes it a viable candidate for environmental sensing applications. In addition, the proposed MEMS TPO technology also benefits cost reduction through the SOI-MEMS batch process as compared to its optical counterparts.





Sheng-Shian Li received the Ph.D. degree from the University of Michigan, Ann Arbor, MI, USA, in electrical engineering and computer science. In 2007, he joined RF Micro Devices, Greensboro, NC, USA, where he was an R&D Senior Design Engineer for the development of MEMS resonators and filters. In 2008, he joined the Institute of NEMS, National Tsing Hua University, Hsinchu, Taiwan, where he is currently a Professor. His research interests include nano/microelectromechanical systems, integrated resonators and sensors, RF MEMS, and CMOS-MEMS technology. Dr. Li was a recipient of the Young Faculty Research Award from the National Tsing Hua University in 2013. In the same year, Dr. Li also received the Ta-Yu Wu Memorial Award from the Ministry of Science and Technology of Taiwan. Together with his students, he received the Best Student Paper Awards at the 2011 IEEE International Frequency Control Symposium and the 2012 IEEE Sensors Conference. He served as the TPC of the IEEE International Frequency Control Symposium (IFCS), IEEE Sensors Conference, and ETPC of Transducers Conference. He served as the local organizing committee chair for the 2014 IEEE IFCS and TPC vice chair (Group 1) for the 2016 IEEE IFCS, respectively.

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