Piezoelectric Materials for MEMS Application

Prof. Hiroshi Funakubo

Professor, Department of Innovative and Engineered Materials

Tokyo Institute of Technology

 

MEMS用圧電体材料

舟窪 浩 氏

東京工業大学大学院 総合理工学研究科 物質科学創造専攻 教授

Abstract

 

Piezoelectric materials are one of the key functional materials for MEMS applications.  In my presentation, I review the current status of the piezoelectric materials and introduce the feature prospect.  

 

CV

 

Hiroshi Funakubo is a professor of Department of Innovative and Engineered Materials, Tokyo Institute of Technology.  He received the Ph. Dr. degree from Tokyo Institute of Technology.  In 1989, he was an assistant professor in the Faculty of Engineering, Tokyo Institute of Technology.  In 1997 and 2012, he has been an associate professor and full professor of Interdisciplinary graduate school of Science and Technology, Department of Innovative and Engineering Materials, Tokyo Institute of Technology.

Specific areas of interest include preparation and properties of dielectric, ferroelectric and piezoelectric films.

 


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